“Bayesian Inference in Optical Metrology” (acronym “BayesOM”)

funding Source: National Science Centre (Preludium BIS)

team: M.Sc. Eng. Damian Suski (SD PW)

partners: The group of Prof. Balpreet Ahluwalia from The Arctic University of Norway, Tromsø, Norway

project description:

The BayesOM project aims to develop a novel interferometric full-field optical metrology method for the semiconductor industry. Instead of the traditional approach requiring the acquisition of multiple interferograms with phase shifting, we propose to employ algorithmic phase demodulation using a single fringe pattern image. The innovative aspect lies in the application of Bayesian inference, which enables precise estimation of the geometric parameters of structures such as waveguides. In contrast to classical methods based on Fourier or Hilbert transforms, our approach achieves subpixel accuracy by minimizing errors in regions with abrupt height changes. The integration of this technique with a precision interferometer may theoretically provide sensitivity at the level of single Angstroms. Planned studies include both simulations and experiments with various Bayesian models to improve measurement accuracy under challenging conditions.

link: https://qcilab.mchtr.pw.edu.pl/